diff --git a/packages/playground/worker/__tests__/es/es-worker.spec.ts b/packages/playground/worker/__tests__/es/es-worker.spec.ts
index 51497a0f5ebadd..c7fd0d6c19e4bc 100644
--- a/packages/playground/worker/__tests__/es/es-worker.spec.ts
+++ b/packages/playground/worker/__tests__/es/es-worker.spec.ts
@@ -60,7 +60,7 @@ if (isBuild) {
   // assert correct files
   test('inlined code generation', async () => {
     const files = fs.readdirSync(assetsDir)
-    expect(files.length).toBe(20)
+    expect(files.length).toBe(22)
     const index = files.find((f) => f.includes('main-module'))
     const content = fs.readFileSync(path.resolve(assetsDir, index), 'utf-8')
     const worker = files.find((f) => f.includes('my-worker'))
@@ -94,7 +94,7 @@ test('classic worker', async () => {
 
 test('emit chunk', async () => {
   expect(await page.textContent('.emti-chunk-worker')).toMatch(
-    '{"msg1":"module1","msg2":"module2","msg3":"module3"}'
+    '["A string",{"type":"emit-chunk-sub-worker","data":"A string"},{"type":"module-and-worker:worker","data":"A string"},{"type":"module-and-worker:module","data":"module and worker"},{"type":"emit-chunk-sub-worker","data":{"module":"module and worker","msg1":"module1","msg2":"module2","msg3":"module3"}}]'
   )
   expect(await page.textContent('.emti-chunk-dynamic-import-worker')).toMatch(
     '"A string/es/"'
diff --git a/packages/playground/worker/emit-chunk-nested-worker.js b/packages/playground/worker/emit-chunk-nested-worker.js
index dff0f5bc64c5ad..6cb72b9488cfaf 100644
--- a/packages/playground/worker/emit-chunk-nested-worker.js
+++ b/packages/playground/worker/emit-chunk-nested-worker.js
@@ -1,7 +1,28 @@
 import SubWorker from './emit-chunk-sub-worker?worker'
-
 const subWorker = new SubWorker()
 
 subWorker.onmessage = (event) => {
-  self.postMessage(event.data)
+  self.postMessage({
+    type: 'emit-chunk-sub-worker',
+    data: event.data
+  })
 }
+
+const moduleWorker = new Worker(
+  new URL('./module-and-worker.js', import.meta.url),
+  { type: 'module' }
+)
+
+moduleWorker.onmessage = (event) => {
+  self.postMessage({
+    type: 'module-and-worker:worker',
+    data: event.data
+  })
+}
+
+import('./module-and-worker').then((res) => {
+  self.postMessage({
+    type: 'module-and-worker:module',
+    data: res.module
+  })
+})
diff --git a/packages/playground/worker/emit-chunk-sub-worker.js b/packages/playground/worker/emit-chunk-sub-worker.js
index bd6b1f6e4f7419..5d20becc781dd7 100644
--- a/packages/playground/worker/emit-chunk-sub-worker.js
+++ b/packages/playground/worker/emit-chunk-sub-worker.js
@@ -1,6 +1,8 @@
-Promise.all([import('./modules/module2'), import('./modules/module3')]).then(
-  (data) => {
-    const _data = { ...data[0], ...data[1] }
-    self.postMessage(_data)
-  }
-)
+Promise.all([
+  import('./module-and-worker'),
+  import('./modules/module2'),
+  import('./modules/module3')
+]).then((data) => {
+  const _data = { ...data[0], ...data[1], ...data[2] }
+  self.postMessage(_data)
+})
diff --git a/packages/playground/worker/index.html b/packages/playground/worker/index.html
index fb4b3e9e85bfc8..aec3995b60a06e 100644
--- a/packages/playground/worker/index.html
+++ b/packages/playground/worker/index.html
@@ -62,7 +62,9 @@ <h2 class="format-iife">format iife:</h2>
 <h2 class="format-es"></h2>
 
 <p>
-  worker emit chunk
+  worker emit chunk <br />
+  module and worker:worker in worker file <br />
+  module and worker:module in worker file <br />
   <span class="classname">.emti-chunk-worker</span>
 </p>
 <code class="emti-chunk-worker"></code>
@@ -73,6 +75,12 @@ <h2 class="format-es"></h2>
 </p>
 <code class="emti-chunk-dynamic-import-worker"></code>
 
+<p>
+  module and worker:worker in simple file
+  <span class="classname">.module-and-worker-worker</span>
+</p>
+<code class="module-and-worker-worker"></code>
+
 <style>
   p {
     background: rgba(0, 0, 0, 0.1);
diff --git a/packages/playground/worker/module-and-worker.js b/packages/playground/worker/module-and-worker.js
new file mode 100644
index 00000000000000..659e556f08e4a6
--- /dev/null
+++ b/packages/playground/worker/module-and-worker.js
@@ -0,0 +1,5 @@
+import constant from './modules/module'
+
+self.postMessage(constant)
+
+export const module = 'module and worker'
diff --git a/packages/playground/worker/worker/main-format-es.js b/packages/playground/worker/worker/main-format-es.js
index aa16636c34c73a..801c13469151a3 100644
--- a/packages/playground/worker/worker/main-format-es.js
+++ b/packages/playground/worker/worker/main-format-es.js
@@ -8,8 +8,17 @@ function text(el, text) {
 text('.format-es', 'format es:')
 
 const nestedWorker = new NestedWorker()
+const dataList = []
 nestedWorker.addEventListener('message', (ev) => {
-  text('.emti-chunk-worker', JSON.stringify(ev.data))
+  dataList.push(ev.data)
+  text(
+    '.emti-chunk-worker',
+    JSON.stringify(
+      dataList.sort(
+        (a, b) => JSON.stringify(a).length - JSON.stringify(b).length
+      )
+    )
+  )
 })
 
 const dynamicImportWorker = new Worker(
@@ -21,3 +30,12 @@ const dynamicImportWorker = new Worker(
 dynamicImportWorker.addEventListener('message', (ev) => {
   text('.emti-chunk-dynamic-import-worker', JSON.stringify(ev.data))
 })
+
+const moduleWorker = new Worker(
+  new URL('../module-and-worker.js', import.meta.url),
+  { type: 'module' }
+)
+
+moduleWorker.addEventListener('message', (ev) => {
+  text('.module-and-worker-worker', JSON.stringify(ev.data))
+})
diff --git a/packages/playground/worker/worker/main-module.js b/packages/playground/worker/worker/main-module.js
index b66c7299cdf690..417cf1728c4b09 100644
--- a/packages/playground/worker/worker/main-module.js
+++ b/packages/playground/worker/worker/main-module.js
@@ -28,6 +28,7 @@ inlineWorker.addEventListener('message', (e) => {
 })
 
 document.querySelector('.ping-inline').addEventListener('click', () => {
+  console.log('111')
   inlineWorker.postMessage('ping')
 })
 
diff --git a/packages/vite/src/node/plugins/define.ts b/packages/vite/src/node/plugins/define.ts
index 024cf32d41f72a..19ca28b34433a0 100644
--- a/packages/vite/src/node/plugins/define.ts
+++ b/packages/vite/src/node/plugins/define.ts
@@ -10,7 +10,6 @@ const isNonJsRequest = (request: string): boolean => nonJsRe.test(request)
 
 export function definePlugin(config: ResolvedConfig): Plugin {
   const isBuild = config.command === 'build'
-  const isWorker = config.isWorker
 
   const processNodeEnv: Record<string, string> = {
     'process.env.NODE_ENV': JSON.stringify(process.env.NODE_ENV || config.mode),
@@ -41,12 +40,7 @@ export function definePlugin(config: ResolvedConfig): Plugin {
     Object.assign(importMetaKeys, {
       'import.meta.env.': `({}).`,
       'import.meta.env': JSON.stringify(config.env),
-      'import.meta.hot': `false`,
-      ...(isWorker
-        ? {
-            'import.meta.url': 'self.location.href'
-          }
-        : {})
+      'import.meta.hot': `false`
     })
   }
 
diff --git a/packages/vite/src/node/plugins/worker.ts b/packages/vite/src/node/plugins/worker.ts
index 70bfd916e21cab..1e122d141f4898 100644
--- a/packages/vite/src/node/plugins/worker.ts
+++ b/packages/vite/src/node/plugins/worker.ts
@@ -6,8 +6,65 @@ import type Rollup from 'rollup'
 import { ENV_PUBLIC_PATH } from '../constants'
 import path from 'path'
 import { onRollupWarning } from '../build'
+import type { EmittedFile } from 'rollup'
+
+interface WorkerCache {
+  // save worker bundle emitted files avoid overwrites the same file.
+  // <chunk_filename, hash>
+  assets: Map<string, string>
+  chunks: Map<string, string>
+  // worker bundle don't deps on any more worker runtime info an id only had an result.
+  // save worker bundled file id to avoid repeated execution of bundles
+  // <filename, hash>
+  bundle: Map<string, string>
+  // nested worker bundle context don't had file what emitted by outside bundle
+  // save the hash to id to rewrite truth id.
+  // <hash, id>
+  emitted: Map<string, string>
+}
 
 const WorkerFileId = 'worker_file'
+const workerCache = new WeakMap<ResolvedConfig, WorkerCache>()
+
+function emitWorkerFile(
+  ctx: Rollup.TransformPluginContext,
+  config: ResolvedConfig,
+  asset: EmittedFile,
+  type: 'assets' | 'chunks'
+): string {
+  const fileName = asset.fileName!
+  const workerMap = workerCache.get(config)!
+
+  if (workerMap[type].has(fileName)) {
+    return workerMap[type].get(fileName)!
+  }
+  const hash = ctx.emitFile(asset)
+  workerMap[type].set(fileName, hash)
+  workerMap.emitted.set(hash, fileName)
+  return hash
+}
+
+function emitWorkerAssets(
+  ctx: Rollup.TransformPluginContext,
+  config: ResolvedConfig,
+  asset: EmittedFile
+) {
+  const { format } = config.worker
+  return emitWorkerFile(
+    ctx,
+    config,
+    asset,
+    format === 'es' ? 'chunks' : 'assets'
+  )
+}
+
+function emitWorkerChunks(
+  ctx: Rollup.TransformPluginContext,
+  config: ResolvedConfig,
+  asset: EmittedFile
+) {
+  return emitWorkerFile(ctx, config, asset, 'chunks')
+}
 
 export async function bundleWorkerEntry(
   ctx: Rollup.TransformPluginContext,
@@ -37,11 +94,13 @@ export async function bundleWorkerEntry(
     code = outputCode.code
     outputChunks.forEach((outputChunk) => {
       if (outputChunk.type === 'asset') {
-        ctx.emitFile(outputChunk)
-      }
-      if (outputChunk.type === 'chunk') {
-        ctx.emitFile({
-          fileName: `${config.build.assetsDir}/${outputChunk.fileName}`,
+        emitWorkerAssets(ctx, config, outputChunk)
+      } else if (outputChunk.type === 'chunk') {
+        emitWorkerChunks(ctx, config, {
+          fileName: path.posix.join(
+            config.build.assetsDir,
+            outputChunk.fileName
+          ),
           source: outputChunk.code,
           type: 'asset'
         })
@@ -53,12 +112,50 @@ export async function bundleWorkerEntry(
   return Buffer.from(code)
 }
 
+export async function workerFileToUrl(
+  ctx: Rollup.TransformPluginContext,
+  config: ResolvedConfig,
+  id: string
+): Promise<string> {
+  const workerMap = workerCache.get(config)!
+
+  let hash = workerMap.bundle.get(id)
+  if (hash) {
+    // rewrite truth id, no need to replace by asset plugin
+    return config.base + workerMap.emitted.get(hash)!
+  }
+  const code = await bundleWorkerEntry(ctx, config, id)
+  const basename = path.parse(cleanUrl(id)).name
+  const contentHash = getAssetHash(code)
+  const fileName = path.posix.join(
+    config.build.assetsDir,
+    `${basename}.${contentHash}.js`
+  )
+  hash = emitWorkerAssets(ctx, config, {
+    fileName,
+    type: 'asset',
+    source: code
+  })
+  workerMap.bundle.set(id, hash)
+  return `__VITE_ASSET__${hash}__`
+}
+
 export function webWorkerPlugin(config: ResolvedConfig): Plugin {
   const isBuild = config.command === 'build'
+  const isWorker = config.isWorker
 
   return {
     name: 'vite:worker',
 
+    buildStart() {
+      workerCache.set(config, {
+        assets: new Map(),
+        chunks: new Map(),
+        bundle: new Map(),
+        emitted: new Map()
+      })
+    },
+
     load(id) {
       if (isBuild) {
         const parsedQuery = parseRequest(id)
@@ -87,8 +184,8 @@ export function webWorkerPlugin(config: ResolvedConfig): Plugin {
 
       let url: string
       if (isBuild) {
-        const code = await bundleWorkerEntry(this, config, id)
         if (query.inline != null) {
+          const code = await bundleWorkerEntry(this, config, id)
           const { format } = config.worker
           const workerOptions = format === 'es' ? '{type: "module"}' : '{}'
           // inline as blob data url
@@ -103,17 +200,7 @@ export function webWorkerPlugin(config: ResolvedConfig): Plugin {
               }
             }`
         } else {
-          const basename = path.parse(cleanUrl(id)).name
-          const contentHash = getAssetHash(code)
-          const fileName = path.posix.join(
-            config.build.assetsDir,
-            `${basename}.${contentHash}.js`
-          )
-          url = `__VITE_ASSET__${this.emitFile({
-            fileName,
-            type: 'asset',
-            source: code
-          })}__`
+          url = await workerFileToUrl(this, config, id)
         }
       } else {
         url = await fileToUrl(cleanUrl(id), config, this)
@@ -129,6 +216,12 @@ export function webWorkerPlugin(config: ResolvedConfig): Plugin {
         url
       )}, ${JSON.stringify(workerOptions, null, 2)})
       }`
+    },
+
+    renderChunk(code) {
+      if (isWorker && code.includes('import.meta.url')) {
+        return code.replace('import.meta.url', 'self.location.href')
+      }
     }
   }
 }
diff --git a/packages/vite/src/node/plugins/workerImportMetaUrl.ts b/packages/vite/src/node/plugins/workerImportMetaUrl.ts
index 4b5711cf3a6248..9f7a5ebf0d61ae 100644
--- a/packages/vite/src/node/plugins/workerImportMetaUrl.ts
+++ b/packages/vite/src/node/plugins/workerImportMetaUrl.ts
@@ -1,7 +1,7 @@
 import JSON5 from 'json5'
 import type { ResolvedConfig } from '../config'
 import type { Plugin } from '../plugin'
-import { getAssetHash, fileToUrl } from './asset'
+import { fileToUrl } from './asset'
 import {
   blankReplacer,
   cleanUrl,
@@ -11,7 +11,7 @@ import {
   stringsRE
 } from '../utils'
 import path from 'path'
-import { bundleWorkerEntry } from './worker'
+import { workerFileToUrl } from './worker'
 import { parseRequest } from '../utils'
 import { ENV_ENTRY, ENV_PUBLIC_PATH } from '../constants'
 import MagicString from 'magic-string'
@@ -162,18 +162,7 @@ export function workerImportMetaUrlPlugin(config: ResolvedConfig): Plugin {
           const file = path.resolve(path.dirname(id), rawUrl.slice(1, -1))
           let url: string
           if (isBuild) {
-            const content = await bundleWorkerEntry(this, config, file)
-            const basename = path.parse(cleanUrl(file)).name
-            const contentHash = getAssetHash(content)
-            const fileName = path.posix.join(
-              config.build.assetsDir,
-              `${basename}.${contentHash}.js`
-            )
-            url = `__VITE_ASSET__${this.emitFile({
-              fileName,
-              type: 'asset',
-              source: content
-            })}__`
+            url = await workerFileToUrl(this, config, file)
           } else {
             url = await fileToUrl(cleanUrl(file), config, this)
             url = injectQuery(url, WORKER_FILE_ID)