diff --git a/packages/vite-node/src/client.ts b/packages/vite-node/src/client.ts
index 822dc189ac84..2425c34e9791 100644
--- a/packages/vite-node/src/client.ts
+++ b/packages/vite-node/src/client.ts
@@ -91,6 +91,24 @@ export class ModuleCacheMap extends Map<string, ModuleCache> {
     }
     return invalidated
   }
+
+  /**
+   * Invalidate dependency modules of the given modules, down to the bottom-level dependencies
+   */
+  invalidateSubDepTree(ids: string[] | Set<string>, invalidated = new Set<string>()) {
+    for (const _id of ids) {
+      const id = this.normalizePath(_id)
+      if (invalidated.has(id))
+        continue
+      invalidated.add(id)
+      const subIds = Array.from(super.entries())
+        .filter(([,mod]) => mod.importers?.has(id))
+        .map(([key]) => key)
+      subIds.length && this.invalidateSubDepTree(subIds, invalidated)
+      super.delete(id)
+    }
+    return invalidated
+  }
 }
 
 export class ViteNodeRunner {
diff --git a/packages/web-worker/src/pure.ts b/packages/web-worker/src/pure.ts
index 6eaecf38ce7f..da2c6d591ffc 100644
--- a/packages/web-worker/src/pure.ts
+++ b/packages/web-worker/src/pure.ts
@@ -44,7 +44,6 @@ interface InlineWorkerContext {
   postMessage: (data: any) => void
   self: InlineWorkerContext
   global: InlineWorkerContext
-  invalidates: string[]
   importScripts?: any
 }
 
@@ -95,7 +94,6 @@ export function defineWebWorker() {
     public onerror: null | Procedure = null
 
     constructor(url: URL | string) {
-      const invalidates: string[] = []
       const context: InlineWorkerContext = {
         onmessage: null,
         dispatchEvent: (event: Event) => {
@@ -113,7 +111,6 @@ export function defineWebWorker() {
         get global() {
           return context
         },
-        invalidates,
       }
 
       this.inside.on('message', (e) => {
@@ -129,15 +126,11 @@ export function defineWebWorker() {
       const id = (url instanceof URL ? url.toString() : url).replace(/^file:\/+/, '/')
 
       const fsPath = toFilePath(id, config.root)
-      invalidates.push(fsPath)
 
       runner.executeFile(fsPath)
         .then(() => {
-          invalidates.forEach((fsPath) => {
-            // worker should be new every time
-            moduleCache.delete(fsPath)
-            moduleCache.delete(`mock:${fsPath}`)
-          })
+          // worker should be new every time, invalidate its sub dependency
+          moduleCache.invalidateSubDepTree([fsPath, `mock:${fsPath}`])
           const q = this.messageQueue
           this.messageQueue = null
           if (q)
diff --git a/test/web-worker/src/selfWorker.ts b/test/web-worker/src/selfWorker.ts
new file mode 100644
index 000000000000..229e8b38aeeb
--- /dev/null
+++ b/test/web-worker/src/selfWorker.ts
@@ -0,0 +1,3 @@
+import subSelf from './selfWorkerDep'
+
+self.postMessage(subSelf === self)
diff --git a/test/web-worker/src/selfWorkerDep.ts b/test/web-worker/src/selfWorkerDep.ts
new file mode 100644
index 000000000000..df83f106c0c7
--- /dev/null
+++ b/test/web-worker/src/selfWorkerDep.ts
@@ -0,0 +1 @@
+export default self
diff --git a/test/web-worker/test/init.test.ts b/test/web-worker/test/init.test.ts
index d58f7872674a..a22872f0c9c7 100644
--- a/test/web-worker/test/init.test.ts
+++ b/test/web-worker/test/init.test.ts
@@ -2,6 +2,9 @@ import { expect, it } from 'vitest'
 
 import MyWorker from '../src/worker?worker'
 import MyEventListenerWorker from '../src/eventListenerWorker?worker'
+import MySelfWorker from '../src/selfWorker?worker'
+
+const sleep = (time: number) => new Promise(resolve => setTimeout(resolve, time))
 
 const testWorker = (worker: Worker) => {
   return new Promise<void>((resolve) => {
@@ -14,6 +17,14 @@ const testWorker = (worker: Worker) => {
   })
 }
 
+const testSelfWorker = (worker: Worker) => {
+  return new Promise<boolean>((resolve) => {
+    worker.onmessage = (e) => {
+      resolve(e.data)
+    }
+  })
+}
+
 it('worker exists', async () => {
   expect(Worker).toBeDefined()
 })
@@ -42,3 +53,16 @@ it('worker with url', async () => {
 
   await testWorker(new Worker(new URL('../src/worker.ts', url)))
 })
+
+it('self injected into worker and its deps should be equal', async () => {
+  expect.assertions(4)
+  expect(await testSelfWorker(new MySelfWorker())).toBeTruthy()
+  // wait for clear worker mod cache
+  await sleep(500)
+  expect(await testSelfWorker(new MySelfWorker())).toBeTruthy()
+
+  expect(await testSelfWorker(new Worker(new URL('../src/selfWorker.ts', import.meta.url)))).toBeTruthy()
+  // wait for clear worker mod cache
+  await sleep(500)
+  expect(await testSelfWorker(new Worker(new URL('../src/selfWorker.ts', import.meta.url)))).toBeTruthy()
+})